Specific Process Knowledge/Characterization/Topographic measurement: Difference between revisions
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|<1Å - accuracy better than 2% | |<1Å - accuracy better than 2% | ||
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|-style="background:LightGrey; color:black" | |||
!'''Resolution xy''' | |||
|down to 0.067 µm | |||
|down to 0.003 µm | |||
|Depending on the objective: | |||
*0.5µm -> 5µm | |||
|Depending on scan size and number of samples per line and number of lines - accuracy better than 2% | |||
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|-style="background:WhiteSmoke; color:black" | |||
!'''Max. scan range z''' | |||
|1Å, 10Å, 40Å or 160Å | |||
|1Å, 10Å, 80Å or 160Å | |||
|Depending on measuring methode: | |||
*PSI down to 0.01 nm | |||
*VSI down to 1 nm | |||
*Confocal (depending on objective): 1nm -> 50nm | |||
|<1Å - accuracy better than 2% | |||
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