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Specific Process Knowledge/Characterization/Topographic measurement: Difference between revisions

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Bghe (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, Bureaucrats, Administrators
7,317 edits
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|Can be done on a selected surface area  
|Can be done on a selected surface area  
|-  
|-  
|}
{|border="1" cellspacing="1" cellpadding="3" style="text-align:left;"
|-
|-
|-style="background:silver; color:black"
!
![[Specific Process Knowledge/Characterization/Profiler#Dektak_8_stylus_profiler|Dektak 8 stylus profiler]]
![[Specific Process Knowledge/Characterization/Profiler#Dektak XTA_new_stylus_profiler|Dektak XTA_new stylus profiler]]
![[Specific Process Knowledge/Characterization/Profiler#Optical_Profiler_(Sensofar)|Optical Profiler (Sensofar)]]
![[Specific Process Knowledge/Characterization/AFM: Atomic Force Microscopy|Nanoman]]
|-
|-
|-style="background:WhiteSmoke; color:black"
!Generel description
|Profiler for measuring micro structures. Can do wafer mapping and stress measurements.
|Profiler for measuring micro structures. Can do wafer mapping and stress measurements.
|3D Profiler for measuring micro structures. Can do wafer mapping.
|AFM for measuring nanostructures and surface roughness
|-
|-
|-style="background:LightGrey; color:black"
!'''Max. scan range xy'''
|Line scan x: 50µm to 200mm
|Line scan x: 50µm to 55mm in one scan. Maximum scan lenght with stiching 200mm.
|Depending on the objective:
*One view: 127µmX95µm to 1270µmX955µm
*Stitching: In principel a hole 6" wafer (time consuming)
|90 µm square
|-
|-
|-style="background:WhiteSmoke; color:black"
!'''Max. scan range z'''
|1Å, 10Å, 40Å or 160Å
|1Å, 10Å, 80Å or 160Å
|Depending on measuring methode:
*PSI down to 0.01 nm
*VSI down to 1 nm
*Confocal (depending on objective): 1nm -> 50nm
|<1Å - accuracy better than 2%
|-
|-
|-style="background:LightGrey; color:black"
!Substrate size
|
*<nowiki>#</nowiki> small samples
*<nowiki>#</nowiki> 50 mm wafers
*<nowiki>#</nowiki> 100 mm wafers
*<nowiki>#</nowiki> 150 mm wafers
|
*<nowiki>#</nowiki> small samples
*<nowiki>#</nowiki> 50 mm wafers
*<nowiki>#</nowiki> 100 mm wafers
*<nowiki>#</nowiki> 150 mm wafers
|-
|-
|-style="background:WhiteSmoke; color:black"
!'''Allowed materials'''
|
*Allowed material 1
*Allowed material 2
|
*Allowed material 1
*Allowed material 2
*Allowed material 3
|-
|}
|}
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