Specific Process Knowledge/Etch/IBE⁄IBSD Ionfab 300/IBE Au etch: Difference between revisions
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!Selectivity Au/Ti | !Selectivity Au/Ti | ||
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3. | 3.9 (15-12-2011) | ||
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9. | 9.9 (13-12-2011) | ||
|-valign="top" | |-valign="top" | ||
!SEM images of the etch profile (click to view a larger image) | !SEM images of the etch profile (click to view a larger image) | ||