Specific Process Knowledge/Characterization/Sample imaging: Difference between revisions
| Line 193: | Line 193: | ||
|Samples have to be (semi)conducting, but may have a thin (> ~ 5 µm) layers of non-conducting materials on top. | |Samples have to be (semi)conducting, but may have a thin (> ~ 5 µm) layers of non-conducting materials on top. | ||
:Non-conducting samples (thick polymer, qaurtz or glass samples) can be inspected in the FEI-SEM or one of the Supra-SEMs. | :Non-conducting samples (thick polymer, qaurtz or glass samples) can be inspected in the FEI-SEM or one of the Supra-SEMs. | ||
| | |Sample dimensions have to be smaller than stylus dimensions | ||
| | |Sample dimensions have to be smaller than tip dimensions | ||
|- | |- | ||
| Line 216: | Line 216: | ||
*One 50 mm wafer | *One 50 mm wafer | ||
*One 100 mm wafer | *One 100 mm wafer | ||
:(not possible to inspect entire wafer in JEOL SEM) | :(not possible to inspect entire wafer in JEOL-SEM) | ||
*One 150 mm wafer | *One 150 mm wafer | ||
:( | :(not JEOL-SEM) | ||
*One 2000 mm wafer | *One 2000 mm wafer | ||
:(only | :(only Supra 60VP, not possible to inspect entire wafer) | ||
| | | | ||
*One small sample | *One small sample | ||