Specific Process Knowledge/Characterization/Sample imaging: Difference between revisions
| Line 189: | Line 189: | ||
|-style="background:LightGrey; color:black" | |-style="background:LightGrey; color:black" | ||
!Sample requirements | !Sample requirements | ||
|None | |||
| | | | ||
| | |Samples have to be (semi)conducting, but may have a thin (> ~ 5 µm) layers of non-conducting materials on top. | ||
:Non-conducting samples (thick polymer, qaurtz or glass samples) can be inspected in the FEI-SEM or one of the Supra-SEMs. | |||
| | | | ||
| | | | ||