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Specific Process Knowledge/Characterization/Topographic measurement: Difference between revisions

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Bureaucrats, danchip, Administrators
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BGE (talk | contribs)
Bureaucrats, danchip, Administrators
2,908 edits
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|General description
|General description
|Profiler for measuring micro structures
|Profiler for measuring micro structures
|Profiler for measuring micro structures. Can do wafer mapping
|Profiler for measuring micro structures. Can do wafer mapping and stress measurements.
|AFM for measuring nanostructures and surface roughness
|AFM for measuring nanostructures and surface roughness
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