Specific Process Knowledge/Etch/Etching of SU-8: Difference between revisions

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 ==Roughness and antimony effects in SU-8 etching==
+{| border="1" cellspacing="1" cellpadding="2"  align="left"
+! Oxygen etch
+! SU8aniso
+! SU8iso
+|-
+|[[Image:SU8-oxygen-etch_Q12.jpg|200x200px]]
+|[[Image:SU8-SU8aniso_R15.jpg|200x200px]]
+|
+|}