Specific Process Knowledge/Etch/Etching of SU-8: Difference between revisions
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===SU8iso=== | ===SU8iso=== | ||
The SU8iso etch was developed for thinning of lithography defined structures to gain higher aspect ratio or thinner structures than possible with photo lithography. | The SU8iso etch was developed for thinning of lithography defined structures to gain higher aspect ratio or thinner structures than possible with photo lithography. | ||
==Roughness and antimony effects in SU-8 etching== | |||