Specific Process Knowledge/Etch/Etching of SU-8: Difference between revisions
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{| border="2" cellpadding="2" cellspacing="1" style="text-align:center;" | {| border="2" cellpadding="2" cellspacing="1" style="text-align:center;" | ||
|+ '''SU8aniso | |+ '''SU8aniso and SU8iso etches''' by khara@danchip | ||
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! Parameter | ! Parameter | ||