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Specific Process Knowledge/Etch/Etching of SU-8: Difference between revisions

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Khara (talk | contribs)
DCH-Employees-701, NLAB-LabmanagerAllUsers
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Khara (talk | contribs)
DCH-Employees-701, NLAB-LabmanagerAllUsers
277 edits
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! Parameter
! Parameter
! SU8aniso etch
! SU8aniso etch
! SU8iso
! SU8iso etch
|-
|-
! O<sub>2</sub> (sccm)
! O<sub>2</sub> (sccm)
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