Specific Process Knowledge/Etch/Etching of SU-8: Difference between revisions
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!anisotropy | !anisotropy | ||
|~0.8 | |~0.8 | ||
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!Sb in surface layer (%) | |||
|<2 | |||
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===SU8iso | ===SU8iso | ||
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| Line 38: | Line 38: | ||
!anisotropy | !anisotropy | ||
|~0.8 | |~0.8 | ||
|- | |||
!Sb in surface layer (%) | |||
|<2 | |||
|} | |} | ||
===SU8iso | ===SU8iso | ||