Specific Process Knowledge/Characterization/Sample imaging: Difference between revisions
Appearance
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*Step height | |||
*Surface roughness | |||
*Film thickness | |||
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| | |3D Surface topography | ||
| | |2D Surface topography | ||
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| Line 80: | Line 80: | ||
| | | | ||
| | | | ||
*Step height | |||
*Surface roughness | |||
*Film thickness | |||
| | | | ||
| | |3D Surface topography | ||
| | |2D Surface topography | ||
|- | |- | ||