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Specific Process Knowledge/Characterization/Sample imaging: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
2,331 edits
Pevo (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
2,331 edits
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|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
!Generel description
!Generel description
|Optical microscopes
|Optical microscope
(several)
(several)
|Optical profiler  
|Optical profiler  
(Sensofar)
(Sensofar)
|Scanning electron microscope  
|Scanning electron microscope  
([[Specific_Process_Knowledge/Characterization/SEM:_Scanning_Electron_Microscopy/Zeiss|Zeiss]], [[Specific_Process_Knowledge/Characterization/SEM:_Scanning_Electron_Microscopy/LEO|LEO]], [[Specific_Process_Knowledge/Characterization/SEM:_Scanning_Electron_Microscopy/FEI|FEI]], [[Specific_Process_Knowledge/Characterization/SEM:_Scanning_Electron_Microscopy/Jeol|JEOL]])
([[Specific_Process_Knowledge/Characterization/SEM:_Scanning_Electron_Microscopy/Zeiss|SEM-Zeiss]], [[Specific_Process_Knowledge/Characterization/SEM:_Scanning_Electron_Microscopy/LEO|SEM-LEO]], [[Specific_Process_Knowledge/Characterization/SEM:_Scanning_Electron_Microscopy/FEI|SEM-FEI]], [[Specific_Process_Knowledge/Characterization/SEM:_Scanning_Electron_Microscopy/Jeol|SEM-JEOL]])
|Atomic force microscope  
|Atomic force microscope  
(NanoMan)
(NanoMan)
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|
|
|Three times pixel-to-pixel distance:
|Three times pixel-to-pixel distance:
*10x objective: 4.95 &mu  
*10x objective: 4.95 μm
*100x objective: 0.495 &mu
*100x objective: 0.495 μm
|1-20 nm
|1-20 nm
Depends on what SEM you use
Depends on what SEM you use
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|Interaction volume
|Interaction volume
|Tip shape (standard tips: width 10 nm, angle 45<sup>o</sup>). It is possible to buy high aspect ratio tips
|Tip shape (standard tips: width 10 nm, angle 45<sup>o</sup>). It is possible to buy high aspect ratio tips
|Stylus shape (width 5 &mu;, angle 45<sup>o</sup>)  
|Stylus shape (width 5 &mu;m, angle 45<sup>o</sup>)  
|-
|-


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!XY range/field of view
!XY range/field of view
|
|
|10x magnification: 1.27 &times; 0.995 mm. 100x magnification: 0.127 &times; 0.095 mm
|
|Depending on detector, working distance and magnification.
*10x magnification: 1.27 &times; 0.995 mm  
|Camera: 150 &times 675 &mu   
*100x magnification: 0.127 &times; 0.095 mm
X-Y scan range: Up to 90 &times 90 &mu
|Depending on detector, working distance and magnification  
|Camera: 150 &times 675 &mu;m  
X-Y scan range: Up to 90 &times 90 &mu;m
|
|
|-
|-
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!Working distance
!Working distance
|Few mm
|Few mm
|10x objective: 17.5 mm  
|
50x objective, NA 9.95: 0.3 mm  
*10x objective: 17.5 mm  
*50x objective, NA 9.95: 0.3 mm  
|3 mm - 20 mm
|3 mm - 20 mm
|Contact/tapping measurement  
|Contact/tapping measurement  
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