Specific Process Knowledge/Thin film deposition: Difference between revisions
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*[[/Alcatel|Alcatel]] - ''E-beam evaporator and sputter tool'' | *[[/Alcatel|Alcatel]] - ''E-beam evaporator and sputter tool'' | ||
*[[/Lesker|Lesker]] - ''Sputter tool'' | *[[/Lesker|Lesker]] - ''Sputter tool'' - writer: Rune | ||
*[[/Leybold|Leybold]] - ''E-beam evaporator and multiple wafer tool'' | *[[/Leybold|Leybold]] - ''E-beam evaporator and multiple wafer tool'' | ||
*[[/Wordentec|Wordentec]] - ''E-beam evaporator, sputter and thermical evaporator'' | *[[/Wordentec|Wordentec]] - ''E-beam evaporator, sputter and thermical evaporator'' | ||