Specific Process Knowledge/Characterization/Thickness Measurer: Difference between revisions

Revision as of 14:17, 21 October 2013

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This is a micrometer-screw.

It measures with an accurracy within a few µm. The range is from a few µm up to 5mm. Measure the wafer in the box next to the meter. If this is ok, then other wafers can be measured. There is a calibration device by the DEKTAK. It is calibrated at 750µm.

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			'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/Thickness_Measurer]'''


	This is a micrometer-screw.		This is a micrometer-screw.