Specific Process Knowledge/Thin film deposition/PECVD: Difference between revisions
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==PECVD Plasma Enhanced Chemical Vapor Deposition== | ==PECVD Plasma Enhanced Chemical Vapor Deposition== | ||
[[image:Cluster1a.jpg|200x200px|right|thumb|PECVD1 (part of cluster1) - positioned in cleanroom2]] | [[image:Cluster1a.jpg|200x200px|right|thumb|PECVD1 (part of cluster1) - positioned in cleanroom2]] | ||