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Specific Process Knowledge/Etch/Etching of Aluminium: Difference between revisions

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Bureaucrats, danchip, Administrators
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Fj (talk | contribs)
Bureaucrats, danchip, Administrators
143 edits
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Etching of aluminium is done wet at Danchip. We have two different solutions:
Etching of aluminium is done wet at Danchip. We have two different solutions:


(1) H<math>_2</math>O:H<math>_3</math>PO<math>_4</math>  1:2 at 50 <sup>o</sup>C
# H<math>_2</math>O:H<math>_3</math>PO<math>_4</math>  1:2 at 50 <sup>o</sup>C
(2) Pre-mixed etch solution: PES 77-19-04 at 20 <sup>o</sup>C
# Pre-mixed etch solution: PES 77-19-04 at 20 <sup>o</sup>C
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