Specific Process Knowledge/Etch/Etching of Aluminium: Difference between revisions

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Etching of aluminium is done wet at Danchip. We have two different solutions:
Etching of aluminium is done wet at Danchip. We have two different solutions:


(1) H<math>_2</math>O:H<math>_3</math>PO<math>_4</math>  1:2 at 50 <sup>o</sup>C
# H<math>_2</math>O:H<math>_3</math>PO<math>_4</math>  1:2 at 50 <sup>o</sup>C
(2) Pre-mixed etch solution: PES 77-19-04 at 20 <sup>o</sup>C
# Pre-mixed etch solution: PES 77-19-04 at 20 <sup>o</sup>C

Revision as of 11:36, 4 January 2008

Etching of Aluminium

Etching of aluminium is done wet at Danchip. We have two different solutions:

  1. HO:HPO 1:2 at 50 oC
  2. Pre-mixed etch solution: PES 77-19-04 at 20 oC
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