Specific Process Knowledge/Etch: Difference between revisions

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-[[/Deposition of Silicon Nitride|Silicon Nitride]] - ''and oxynitride'' <br/>
+*[[/Etching of Silicon Nitride|Silicon Nitride]]
-[[/Deposition of Silicon Oxide|Silicon Oxide]]<br/>
+*[[/Etching of Silicon Oxide|Silicon Oxide]]
-[[/Deposition of Titanium Oxide|Titanium Oxide]]<br/>
+*[[/Etching of Bulk Glass|Bulk Glass]] - ''Borofloat (pyrex) and fused silica (quartz)''
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 *[[/Etching of Silicon|Silicon]]