Specific Process Knowledge/Thin film deposition: Difference between revisions
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| align="left" valign="top" style="background:LightGray"|''' Polymers''' | | align="left" valign="top" style="background:LightGray"|''' Polymers''' | ||
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[[/Deposition of Silicon Nitride|Silicon Nitride]] - ''and oxynitride'' <br/> | [[/Deposition of Silicon Nitride|Silicon Nitride]] - ''and oxynitride'' <br/> | ||
[[/Deposition of Silicon Oxide|Silicon Oxide]]<br/> | [[/Deposition of Silicon Oxide|Silicon Oxide]]<br/> | ||
[[/Deposition of Titanium Oxide|Titanium Oxide]]<br/> | [[/Deposition of Titanium Oxide|Titanium Oxide]]<br/> | ||
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[[/Deposition of Silicon|Silicon]] | |||
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[[/Deposition of Aluminium|Aluminium]] <br/> | [[/Deposition of Aluminium|Aluminium]] <br/> | ||
[[/Deposition of Titanium|Titanium]]<br/> | [[/Deposition of Titanium|Titanium]]<br/> | ||
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[[/Deposition of Platinum|Platinum]]<br/> | [[/Deposition of Platinum|Platinum]]<br/> | ||
[[/Deposition of Gold|Gold]]<br/> | [[/Deposition of Gold|Gold]]<br/> | ||
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[[/Deposition of TiW|TiW]] alloy (10%/90% by weight) <br/> | [[/Deposition of TiW|TiW]] alloy (10%/90% by weight) <br/> | ||
[[/Deposition of NiCr|NiCr]] alloy <br/> | [[/Deposition of NiCr|NiCr]] alloy <br/> | ||
[[/Deposition of AlTi|AlTi]] alloy | [[/Deposition of AlTi|AlTi]] alloy | ||
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[[Specific Process Knowledge/Photolithography/SU8|SU8]]<br/> | [[Specific Process Knowledge/Photolithography/SU8|SU8]]<br/> | ||
Antistiction coating <br/> | Antistiction coating <br/> | ||