Specific Process Knowledge/Thin film deposition/Deposition of TiW: Difference between revisions
Appearance
No edit summary |
No edit summary |
||
| Line 2: | Line 2: | ||
Deposition of TiW alloy can take place in the Wordentec. | Deposition of TiW alloy can take place in the Wordentec. '''Observe:''' ''right now we don´t have a TiW target for Wordentec, please contact thinfilm@danchip.dtu.dk if you are interested in depositing TiW.'' | ||