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Specific Process Knowledge/Thin film deposition/Deposition of TiW: Difference between revisions

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Deposition of TiW alloy can take place in the Wordentec.
Deposition of TiW alloy can take place in the Wordentec. '''Observe:''' ''right now we don´t have a TiW target for Wordentec, please contact thinfilm@danchip.dtu.dk if you are interested in depositing TiW.''