Specific Process Knowledge/Thermal Process/Furnace Noble: Difference between revisions
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==Noble furnace== | ==Noble furnace== | ||
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This furnace is used to grow oxide on metals or dirty wafers and to anneal wafers up to 1000 degree Celsius. | This furnace is used to grow oxide on metals or dirty wafers and to anneal wafers up to 1000 degree Celsius. | ||