Specific Process Knowledge/Lithography/Coaters: Difference between revisions
Appearance
| Line 308: | Line 308: | ||
1 - 3 µm | 1 - 3 µm | ||
|style="background:WhiteSmoke; color:black" align="center"| | |style="background:WhiteSmoke; color:black" align="center"| | ||
1 | 1 - 4 µm | ||
|- | |- | ||
|style="background:LightGrey; color:black"|HMDS contact angle | |style="background:LightGrey; color:black"|HMDS contact angle | ||