Specific Process Knowledge/Lithography/Coaters: Difference between revisions
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|style="background:LightGrey; color:black"|Hotplate temperature | |style="background:LightGrey; color:black"|Hotplate temperature | ||
|style="background:WhiteSmoke; color:black" align="center"| | |style="background:WhiteSmoke; color:black" align="center"| | ||
* | * 90° for III-V materials | ||
* | * 110° for III-V materials | ||
* changeable temperature from | * changeable temperature from 20°-200° for other materials | ||
|- | |- | ||
!style="background:silver; color:black" align="center" valign="center" rowspan="3"|Substrates | !style="background:silver; color:black" align="center" valign="center" rowspan="3"|Substrates | ||