Specific Process Knowledge/Lithography/Coaters: Difference between revisions
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|style="background:LightGrey; color:black"|Hotplate temperature | |style="background:LightGrey; color:black"|Hotplate temperature | ||
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* changeable temperature from | * changeable temperature from 20° to 200° | ||
* SU8 must be bake out on SU8 dedicated hotplates | * SU8 must be bake out on SU8 dedicated hotplates | ||
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