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Specific Process Knowledge/Lithography/Coaters: Difference between revisions

Elkh (talk | contribs)
Elkh (talk | contribs)
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|style="background:LightGrey; color:black"|Hotplate temperature
|style="background:LightGrey; color:black"|Hotplate temperature
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* changeable temperature from 20 to 200
* changeable temperature from 20° to 200°
* SU8 must be bake out on SU8 dedicated hotplates
* SU8 must be bake out on SU8 dedicated hotplates
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