Specific Process Knowledge/Etch/Etching of Silicon: Difference between revisions
No edit summary |
|||
| Line 160: | Line 160: | ||
*Silicon Nitride | *Silicon Nitride | ||
*Silicon Oxynitride | *Silicon Oxynitride | ||
*Other materials (only in "Fumehood KOH") | *Other materials (only in "Fumehood KOH" or "KOH1") | ||
| | | | ||
*Silicon | *Silicon | ||