Specific Process Knowledge/Thin film deposition/Wordentec: Difference between revisions
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|style="background:LightGrey; color:black"|Process Temperature | |style="background:LightGrey; color:black"|Process Temperature | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*Less than 80 < | *Less than 80 <sup>o</sup>C | ||
|- | |- | ||
|style="background:silver; color:black"|.||style="background:LightGrey; color:black"|Process pressure | |style="background:silver; color:black"|.||style="background:LightGrey; color:black"|Process pressure | ||