Specific Process Knowledge/Etch/Wet Silicon Oxide Etch (BHF): Difference between revisions
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<gallery caption="Different places to do wet silicon oxide etch" widths="250px" heights="300px" perrow="4"> image:BHF clean RR3.jpg|BHF clean in Cleanroom3. Wet silicon oxide etch bath positioned to the left in the bench. | <gallery caption="Different places to do wet silicon oxide etch" widths="250px" heights="300px" perrow="4"> image:BHF clean RR3.jpg|BHF clean in Cleanroom3. Wet silicon oxide etch bath positioned to the left in the bench. | ||
image:KOH_4tommer.jpg|BHF in | image:KOH_4tommer.jpg|BHF in Cleanroom 3 (KOH bench 1+2.) The BHF bath is positioned between the two KOH baths. This is primarily used to remove oxide before and after a KOH etch. | ||
image:KOH3_RR4.jpg|BHF in Cleanroom 4 (KOH bench for 4" and 6" wafers.) The BHF bath is positioned to the right. This is primarily used to remove oxide before and after a KOH etch. | |||
image:BHF-PolySi-Al Etch.jpg|SIO etch bath(BHF with wetting agent) are positioned to the left in the bench in cleanroom 4. | image:BHF-PolySi-Al Etch.jpg|SIO etch bath(BHF with wetting agent) are positioned to the left in the bench in cleanroom 4. | ||
image:Stinkskab RR2.jpg|PP-bath: positioned in the upper right corner of the fumehood in cleanroom 2. </gallery> | image:Stinkskab RR2.jpg|PP-bath: positioned in the upper right corner of the fumehood in cleanroom 2. </gallery> | ||