Specific Process Knowledge/Thin film deposition/Wordentec: Difference between revisions
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*TiW alloy (10%/90% by weight) | *TiW alloy (10%/90% by weight) | ||
*Aluminium (Al) | *[[Specific Process Knowledge/Thin film deposition/Deposition of Aluminium|Aluminium (Al)]] | ||
*Chromium (Cr) | *[[Specific Process Knowledge/Thin film deposition/Deposition of Chromium|Chromium (Cr)]] | ||
*Titanium (Ti) | *[[Specific Process Knowledge/Thin film deposition/Deposition of Titanium|Titanium (Ti)]] | ||
===Sample materials that are approved for entering the chamber=== | ===Sample materials that are approved for entering the chamber=== | ||