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Specific Process Knowledge/Lithography/Baking: Difference between revisions

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==SU8 hotplates==
==SU8 hotplates==
[[image:su8_bench.jpg|50px]]
[[Image:su8_bench.jpg|200x200px|thumb|SU-8 bench in cleanroom 3]]
We have four dedicated SU-8 hotplates in CR3.
We have four dedicated SU-8 hotplates in CR3.
Users can control the ramp-time, time and temperature.
Users can control the ramp-time, time and temperature.