Specific Process Knowledge/Lithography/Baking: Difference between revisions
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==SU8 hotplates== | ==SU8 hotplates== | ||
[[ | [[Image:su8_bench.jpg|200x200px|thumb|SU-8 bench in cleanroom 3]] | ||
We have four dedicated SU-8 hotplates in CR3. | We have four dedicated SU-8 hotplates in CR3. | ||
Users can control the ramp-time, time and temperature. | Users can control the ramp-time, time and temperature. | ||