Specific Process Knowledge/Etch/IBE⁄IBSD Ionfab 300/IBE Au etch: Difference between revisions
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!SEM images of the etch profile (click to view a larger image) | !SEM images of the etch profile (click to view a larger image) | ||
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<gallery widths="150px" heights="150px" perrow="2"> | <gallery caption="600nm lines etched for 14 min (15-12-2011)" widths="150px" heights="150px" perrow="2"> | ||
image:IBE_Au_Ti_nr13_1.jpg| | image:IBE_Au_Ti_nr13_1.jpg|Several line profiles through Ti and Au. | ||
image:IBE_Au_Ti_nr13_2.jpg| | image:IBE_Au_Ti_nr13_2.jpg|Line profile through Ti and Au. | ||
</gallery> | </gallery> | ||
<gallery widths="150px" heights="150px" perrow="3"> | <gallery widths="150px" heights="150px" perrow="3"> | ||
image:IBE_Au_Ti_uden_Ti_nr13_1.jpg| | image:IBE_Au_Ti_uden_Ti_nr13_1.jpg|Several line profiles in Au after Ti has been removed. | ||
image:IBE_Au_Ti_uden_Ti_nr13_2.jpg| | image:IBE_Au_Ti_uden_Ti_nr13_2.jpg|Line profile in Au after Ti has been removed. | ||
image:IBE_Au_Ti_uden_Ti_nr13_3.jpg| | image:IBE_Au_Ti_uden_Ti_nr13_3.jpg|Line in Au after Ti has been removed. Sample is tilted | ||
</gallery> | </gallery> | ||
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