Specific Process Knowledge/Etch/IBE⁄IBSD Ionfab 300/IBE Au etch: Difference between revisions
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!SEM images of the etch profile | !SEM images of the etch profile | ||
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<gallery | <gallery widths="200px" heights="150px" perrow="2"> | ||
image:IBE_Au_Ti_nr13_1.jpg|Different chemicals for the MVD. | image:IBE_Au_Ti_nr13_1.jpg|Different chemicals for the MVD. | ||
image:IBE_Au_Ti_nr13_2.jpg|The chemical reaction in which the Cl atoms of the precursors are eliminated under formation of HCl. | image:IBE_Au_Ti_nr13_2.jpg|The chemical reaction in which the Cl atoms of the precursors are eliminated under formation of HCl. | ||