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Specific Process Knowledge/Etch/IBE⁄IBSD Ionfab 300/IBE Au etch: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, Bureaucrats, Administrators
7,318 edits
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!SEM images of the etch profile
!SEM images of the etch profile
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<gallery caption="Some chemicals of the MVD and the surface reaction" widths="200px" heights="150px" perrow="2"> image:IBE_Au_Ti_nr13_1.jpg|Different chemicals for the MVD. image:IBE_Au_Ti_nr13_2.jpg|The chemical reaction in which the Cl atoms of the precursors are eliminated under formation of HCl. </gallery>
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