Specific Process Knowledge/Etch/Wet Platinum Etch: Difference between revisions
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|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
!Batch size | !Batch size | ||
| | |1-7 4" wafers at a time | ||
1-7 4" wafers at a time | |||
|- | |- | ||
|-style="background:LightGrey; color:black" | |-style="background:LightGrey; color:black" | ||
!Size of substrate | !Size of substrate | ||
| | |Any that fits into a carrier that can go into the glass beaker | ||
Any that fits into a carrier that can go into the glass beaker | |||
|- | |- | ||
|-style="background:WhiteSmoke; color:black" | |||
!Allowed materials | |||
|No restrictions. | |||
Make a note on the beaker of which materials have been processed. | |||
|} | |} | ||