Specific Process Knowledge/Characterization/Optical characterization: Difference between revisions
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The prism coupler uses an optical waveguide technique to determine the thickness and refractive index of a thin film. To learn more about the theory of measurement please see the homepage of [http://www.metricon.com/basic.htm#anchor1875481 Metricon] | The prism coupler uses an optical waveguide technique to determine the thickness and refractive index of a thin film. To learn more about the theory of measurement please see the homepage of [http://www.metricon.com/basic.htm#anchor1875481 Metricon] | ||
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===A rough overview of the performance of the Prism Coupler=== | |||
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!style="background:silver; color:black;" align="left"|Purpose | |||
|style="background:LightGrey; color:black"|Film thickness measurements and optical characterization of optically transparent thin films||style="background:WhiteSmoke; color:black"| | |||
*Measurement of film thickness | |||
*Optical constants | |||
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!style="background:silver; color:black" align="left"|Performance | |||
|style="background:LightGrey; color:black"|Thin film materials that can be measured||style="background:WhiteSmoke; color:black"| | |||
Film with a refractive index of less than 2.02 and that are transparent to the light in the given wavelength range | |||
ex: | |||
*Silicon Oxide | |||
*Silicon nitride | |||
*polymers | |||
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|style="background:silver; color:black"|.||style="background:LightGrey; color:black"|Film thickness range | |||
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*~1µm to 15 µm | |||
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!style="background:silver; color:black" align="left"|Process parameter range | |||
|style="background:LightGrey; color:black"|Wavelength range | |||
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Can operate at two different wavelength: | |||
*633 nm | |||
*1550 nm | |||
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!style="background:silver; color:black" align="left"|Substrates | |||
|style="background:LightGrey; color:black"|Batch size | |||
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*One sample at a time - all sample larger than 5x5 mm<sup>2</sup>sizes up to 6" | |||
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|style="background:silver; color:black"|.|| style="background:LightGrey; color:black"|Substrate material allowed | |||
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*In principle all materials | |||
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==Comparison of the three methods== | ==Comparison of the three methods== | ||
For comparison of the three methods, see here: [[Specific Process Knowledge/Characterization/Measurement of film thickness and optical constants#Film_thickness_and_optical_constants_of_optical_transparent_films|Film thickness and optical constants of optical transparent films]] | For comparison of the three methods, see here: [[Specific Process Knowledge/Characterization/Measurement of film thickness and optical constants#Film_thickness_and_optical_constants_of_optical_transparent_films|Film thickness and optical constants of optical transparent films]] | ||