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| Line 164: |
Line 164: |
| !Etch rate in resist | | !Etch rate in resist |
| | | | | |
| *<nowiki>#</nowiki> small samples
| | 12.8nm/min |
| *<nowiki>#</nowiki> 50 mm wafers
| |
| *<nowiki>#</nowiki> 100 mm wafers
| |
| *<nowiki>#</nowiki> 150 mm wafers
| |
| | | | | |
| *<nowiki>#</nowiki> small samples
| | 72nm/min |
| *<nowiki>#</nowiki> 50 mm wafers
| |
| *<nowiki>#</nowiki> 100 mm wafers
| |
| *<nowiki>#</nowiki> 150 mm wafers
| |
| |- | | |- |
|
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| Line 179: |
Line 173: |
| !Etch rate in Au | | !Etch rate in Au |
| | | | | |
| *Allowed material 1
| | 32.7nm/min |
| *Allowed material 2
| |
| | | | | |
| *Allowed material 1
| | 42.6nm/min |
| *Allowed material 2
| |
| *Allowed material 3
| |
| |- | | |- |
| |-style="background:LightGrey; color:black" | | |-style="background:LightGrey; color:black" |
| !Etch rate in Ti | | !Etch rate in Ti |
| | | | | |
| *<nowiki>#</nowiki> small samples
| | 8.3nm/min |
| *<nowiki>#</nowiki> 50 mm wafers
| |
| *<nowiki>#</nowiki> 100 mm wafers
| |
| *<nowiki>#</nowiki> 150 mm wafers
| |
| | | | | |
| *<nowiki>#</nowiki> small samples
| | 4.3nm/min |
| *<nowiki>#</nowiki> 50 mm wafers
| |
| *<nowiki>#</nowiki> 100 mm wafers
| |
| *<nowiki>#</nowiki> 150 mm wafers
| |
| |- | | |- |
|
| |
|
| |- | | |- |
| |-style="background:WhiteSmoke; color:black" | | |-style="background:WhiteSmoke; color:black" |
| !Selectivity Zep/Ti | | !Selectivity Ti/Zep |
| | | | | |
| *Allowed material 1
| | 0.65 |
| *Allowed material 2
| |
| | | | | |
| *Allowed material 1
| | 0.06 |
| *Allowed material 2
| |
| *Allowed material 3
| |
| |- | | |- |
| |-style="background:LightGrey; color:black" | | |-style="background:LightGrey; color:black" |
| !Selectivity Au/Ti | | !Selectivity Au/Ti |
| | | | | |
| *<nowiki>#</nowiki> small samples
| | 3.9nm/min |
| *<nowiki>#</nowiki> 50 mm wafers
| |
| *<nowiki>#</nowiki> 100 mm wafers
| |
| *<nowiki>#</nowiki> 150 mm wafers
| |
| | | | | |
| *<nowiki>#</nowiki> small samples
| | 9.9nm/min |
| *<nowiki>#</nowiki> 50 mm wafers
| |
| *<nowiki>#</nowiki> 100 mm wafers
| |
| *<nowiki>#</nowiki> 150 mm wafers
| |
|
| |
|
| |- | | |- |
