Specific Process Knowledge/Characterization/Profiler: Difference between revisions
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==Dektak XTA_new stylus profiler== | ==Dektak XTA_new stylus profiler== | ||
The newer Dektak XTA stylus profiler is usable for profiling surfaces of samples with structures in the | The newer Dektak XTA stylus profiler is usable for profiling surfaces of samples with structures in the micro- and nanometer range. | ||
A profil measurement can be done in a specific point by using a high magnification camera to locate the structure. It is also possible to program the stylus to measure in several positions, defined with respect to some deskew points. Stress measurements of thin films can be done by measuring the wafer bow. | A profil measurement can be done in a specific point by using a high magnification camera to locate the structure. It is also possible to program the stylus to measure in several positions, defined with respect to some deskew points. Stress measurements of thin films can be done by measuring the wafer bow. | ||