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Specific Process Knowledge/Etch/AOE (Advanced Oxide Etch): Difference between revisions

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'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Etch/AOE_(Advanced_Oxide_Etch) click here]'''
== Etching using the dry etch technique AOE (Advanced oxide etch) ==
== Etching using the dry etch technique AOE (Advanced oxide etch) ==
[[Image:AOE.jpg|300x300px|thumb|AOE: positioned in cleanroom 2]]
[[Image:AOE.jpg|300x300px|thumb|AOE: positioned in cleanroom 2]]
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