Specific Process Knowledge/Etch/KOH Etch: Difference between revisions
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*Etch of Silicon in user mixed KOH | *Etch of Silicon in user mixed KOH | ||
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|style="background:LightGrey; color:black"| | |style="background:LightGrey; color:black"|Link to safety APV and KBA | ||
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* | *:[http://www.labmanager.danchip.dtu.dk/d4Show.php?id=1906&mach=248 see APV here] | ||
*:[http://kemibrug.dk/KBA/CAS/106882/?show_KBA=1&portaldesign=1 see KBA here] | |||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
* | *:[http://www.labmanager.danchip.dtu.dk/d4Show.php?id=1906&mach=248 see APV here] | ||
*:[http://kemibrug.dk/KBA/CAS/106882/?show_KBA=1&portaldesign=1 see KBA here] | |||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
* | *:[http://www.labmanager.danchip.dtu.dk/d4Show.php?id=1906&mach=248 see APV here] | ||
*:[http://kemibrug.dk/KBA/CAS/106882/?show_KBA=1&portaldesign=1 see KBA here] | |||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
* | *:[http://www.labmanager.danchip.dtu.dk/d4Show.php?id=1906&mach=248 see APV here] | ||
*:[http://kemibrug.dk/KBA/CAS/106882/?show_KBA=1&portaldesign=1 see KBA here] | |||
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!style="background:silver; color:black" align="center" valign="center" rowspan="4"|Performance | !style="background:silver; color:black" align="center" valign="center" rowspan="4"|Performance | ||