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Specific Process Knowledge/Etch/KOH Etch: Difference between revisions

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*Etch of Silicon in user mixed KOH
*Etch of Silicon in user mixed KOH
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|style="background:LightGrey; color:black"|Links to APV and KBS
|style="background:LightGrey; color:black"|Link to safety APV and KBA
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*Etch of Silicon in 28 wt% KOH
*:[http://www.labmanager.danchip.dtu.dk/d4Show.php?id=1906&mach=248 see APV here]
*:[http://kemibrug.dk/KBA/CAS/106882/?show_KBA=1&portaldesign=1 see KBA here]
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*Etch of Silicon in 28 wt% KOH
*:[http://www.labmanager.danchip.dtu.dk/d4Show.php?id=1906&mach=248 see APV here]
*:[http://kemibrug.dk/KBA/CAS/106882/?show_KBA=1&portaldesign=1 see KBA here]
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*Etch of Silicon in 28 wt% KOH saturated with IPA
*:[http://www.labmanager.danchip.dtu.dk/d4Show.php?id=1906&mach=248 see APV here]
*:[http://kemibrug.dk/KBA/CAS/106882/?show_KBA=1&portaldesign=1 see KBA here]
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*Etch of Silicon in user mixed KOH
*:[http://www.labmanager.danchip.dtu.dk/d4Show.php?id=1906&mach=248 see APV here]
*:[http://kemibrug.dk/KBA/CAS/106882/?show_KBA=1&portaldesign=1 see KBA here]
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!style="background:silver; color:black" align="center" valign="center" rowspan="4"|Performance
!style="background:silver; color:black" align="center" valign="center" rowspan="4"|Performance