Jump to content

Specific Process Knowledge/Lithography/UVLithography: Difference between revisions

Newer edit →
VisualWikitext
Tigre (talk | contribs)
DCH-Employees-701
2,257 edits
Created page with " {|border="1" cellspacing="1" cellpadding="3" style="text-align:left;" |- |- |-style="background:silver; color:black" ![[Specific Process Knowledge/Thin film deposition/Furn..."
 
Tigre (talk | contribs)
DCH-Employees-701
2,257 edits
No edit summary
Line 97: Line 97:


<br clear="all" />
<br clear="all" />
{|border="1" cellspacing="1" cellpadding="3" style="text-align:left;" width="100%"
|-
|-
|-style="background:silver; color:black"
|'''Resist'''
|'''Polarity'''
|'''Manufacturer'''
|'''Comments'''
|'''Technical reports'''
|'''Spinner'''
|'''Developer'''
|'''Rinse'''
|'''Remover'''
|'''Process flows (in docx-format)'''
|-
|-
|-style="background:WhiteSmoke; color:black"
|'''AZ5214E'''
|Positive
|
|
|
|
|
|
|
|
|-
|-style="background:LightGrey; color:black"
|'''AZ4562'''
|Positive
|
|
|
|
|
|
|
|
|-
|-style="background:WhiteSmoke; color:black"
|'''AZ MiR 701'''
|
|
|
|
|
|
|
|
|
|-
|-style="background:WhiteSmoke; color:black"
|'''AZ nLOF 2020'''
|Negative
|
|
|
|
|
|
|
|
|-
|-style="background:LightGrey; color:black"
|'''SU8'''
|Positive
|
|
|
|
|
|
|
|
|}
Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Lithography/UVLithography"