Specific Process Knowledge/Lithography/Coaters: Difference between revisions
| Line 40: | Line 40: | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
* Cassette-to-cassette | * Cassette-to-cassette | ||
| | |colspan="2" align="center"|Single substrate | ||
|Single substrate | |||
|- | |- | ||
|style="background:LightGrey; color:black"|Permanent media | |style="background:LightGrey; color:black"|Permanent media | ||
| Line 58: | Line 57: | ||
* PGMEA for backside rinse and edge-bead removal | * PGMEA for backside rinse and edge-bead removal | ||
* PGMEA for spinner bowl cleaning and vapor tip bath | * PGMEA for spinner bowl cleaning and vapor tip bath | ||
|Only manual dispense | |colspan="2" rowspan="2" align="center"|Only manual dispense | ||
|- | |- | ||
|style="background:LightGrey; color:black"|Manual dispense option | |style="background:LightGrey; color:black"|Manual dispense option | ||
| Line 69: | Line 68: | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
* no | * no | ||
|- | |- | ||
!style="background:silver; color:black" align="center" valign="center" rowspan="2"|Process parameter range | !style="background:silver; color:black" align="center" valign="center" rowspan="2"|Process parameter range | ||
| Line 81: | Line 79: | ||
*10 - 9990 rpm | *10 - 9990 rpm | ||
| | | | ||
|10-5000 rpm | | | ||
*10-5000 rpm | |||
|- | |- | ||
|style="background:LightGrey; color:black"|Parameter 2 | |style="background:LightGrey; color:black"|Parameter 2 | ||