Specific Process Knowledge/Lithography/Coaters: Difference between revisions
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==III-V Spinner== | ==III-V Spinner== | ||
The III-V spinner is a SÜSS RC8 Spin Coater intended for processing of III-V compound semiconductors and CMOS compatible materals. Please note, that '''there are different chucks for III-V materials and Si-, SiO2-materials.''' The spinner is mounted in a | The III-V spinner is a SÜSS RC8 Spin Coater intended for processing of III-V compound semiconductors and CMOS compatible materals. Please note, that '''there are different chucks for III-V materials and Si-, SiO2-materials.''' The spinner is mounted in a flow hood located in the III-V laboratory (yellow room). The extra exhaust should always be turned on while spinning. | ||
[[Image:3-5 spinner.jpg|300x300px|thumb|III-V Aligner positioned in III-V cleanroom ]] | [[Image:3-5 spinner.jpg|300x300px|thumb|III-V Aligner positioned in III-V cleanroom ]] | ||