Specific Process Knowledge/Characterization/Optical characterization: Difference between revisions
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==Ellipsometer== | ==Ellipsometer== | ||
==Filmtek 4000== | ==Filmtek 4000== | ||
[[image:Filmtek.JPG|300x300px|right|thumb|FilmTek: positioned in cleanroom 2]] | [[image:Filmtek.JPG|300x300px|right|thumb|FilmTek 4000: positioned in cleanroom 2]] | ||
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==A rough overview of the performance of the FilmTek and some process related parameters== | ==A rough overview of the performance of the FilmTek and some process related parameters== | ||