Specific Process Knowledge/Lithography/EBeamLithography: Difference between revisions
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|Positive | |Positive | ||
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| | |We have various types of PMMA in the cleanroom, none are provided by DTU Danchip. Please contact [[mailto:Lithography@danchip.dtu.dk Lithography]] for information. | ||
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|[[Specific_Process_Knowledge/Lithography/Coaters#Manual Spinner 1|Manual Spinner 1 (Laurell)]], [[Specific_Process_Knowledge/Lithography/Coaters#III-V Spinner|III-V Spinner]] | |[[Specific_Process_Knowledge/Lithography/Coaters#Manual Spinner 1|Manual Spinner 1 (Laurell)]], [[Specific_Process_Knowledge/Lithography/Coaters#III-V Spinner|III-V Spinner]] | ||