Specific Process Knowledge/Lithography/EBeamLithography: Difference between revisions
| Line 123: | Line 123: | ||
|'''Ma-N 2403''' | |'''Ma-N 2403''' | ||
|'''Mr EBL 6000''' | |'''Mr EBL 6000''' | ||
|'''AR-N 7520''' | |||
|- | |- | ||
| Line 134: | Line 135: | ||
|Positive | |Positive | ||
|Positive | |Positive | ||
|Negative | |||
|Negative | |Negative | ||
|Negative | |Negative | ||
| Line 150: | Line 152: | ||
|Micro Resist | |Micro Resist | ||
|Micro Resist | |Micro Resist | ||
|AllResist | |||
|- | |- | ||
| Line 162: | Line 165: | ||
|Standard negative resist | |Standard negative resist | ||
|CC | |CC | ||
|Negative resist to be tested soon. | |||
| Line 168: | Line 172: | ||
|'''Spinner''' | |'''Spinner''' | ||
|SSE, Manual Spinner 1, III-V Spinner | |SSE, Manual Spinner 1, III-V Spinner | ||
|Manual Spinner 1, III-V spinner | |||
|Manual Spinner 1, III-V spinner | |Manual Spinner 1, III-V spinner | ||
|Manual Spinner 1, III-V spinner | |Manual Spinner 1, III-V spinner | ||
| Line 184: | Line 189: | ||
|AA | |AA | ||
|AA | |AA | ||
|BB | |||
|BB | |BB | ||
|BB | |BB | ||
| Line 196: | Line 202: | ||
|AA | |AA | ||
|AA | |AA | ||
|BB | |||
|BB | |BB | ||
|BB | |BB | ||
| Line 208: | Line 215: | ||
|AA | |AA | ||
|AA | |AA | ||
|BB | |||
|BB | |BB | ||
|BB | |BB | ||
| Line 220: | Line 228: | ||
|AA | |AA | ||
|AA | |AA | ||
|BB | |||
|BB | |BB | ||
|BB | |BB | ||