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Specific Process Knowledge/Etch/AOE (Advanced Oxide Etch): Difference between revisions

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2,908 edits
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*Typical profiles: 86-90 degrees  
*Typical profiles: 86-90 degrees  
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|style="background:silver; color:black"|.||style="background:LightGrey; color:black"|Process pressure
!style="background:silver; color:black" align="left"|Process parameter range
|style="background:WhiteSmoke; color:black"|
|style="background:LightGrey; color:black"|Process pressure||style="background:WhiteSmoke; color:black"|
*~2-20 mTorr
*~2-20 mTorr
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