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Specific Process Knowledge/Characterization/Optical characterization: Difference between revisions

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The ellipsometer VASE is a VASE (Variable Angle Spectroscopic Ellipsometry) ellipsometer from J.A. Woollam Co., Inc. <br/>
The ellipsometer VASE is a VASE (Variable Angle Spectroscopic Ellipsometry) ellipsometer from J.A. Woollam Co., Inc. <br/>
The ellipsometer M2000V is a in-situ ellipsometer fraom J.A. Wollam Co., Inc. this is positioned on the Sputter System Lesker instrument for in-situ measurements.
The ellipsometer M2000V is an in-situ ellipsometer from J.A. Wollam Co., Inc. this is positioned on the Sputter System Lesker instrument for in-situ measurements.


Ellipsometry is a very sensitive characterization technique which can be used to determine thin film layer thicknesses and/or optical constants. It sends in polarized light on the surface at different angles and measures the change in polarization state of the reflected light.  
Ellipsometry is a very sensitive characterization technique which can be used to determine thin film layer thicknesses and/or optical constants. It sends in polarized light on the surface at different angles and measures the change in polarization state of the reflected light.  
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