Specific Process Knowledge/Lithography/Coaters: Difference between revisions
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!style="background:silver; color:black" align="center" valign="center" rowspan="2"|Process parameter range | !style="background:silver; color:black" align="center" valign="center" rowspan="2"|Process parameter range | ||
|style="background:LightGrey; color:black"| | |style="background:LightGrey; color:black"|Spindle speed | ||
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*Range | *Range | ||
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*Range | *Range | ||
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*10 - 9990 rpm | |||
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|style="background:LightGrey; color:black"|Parameter 2 | |style="background:LightGrey; color:black"|Parameter 2 | ||
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*Range | *Range | ||
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*Range | |||
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!style="background:silver; color:black" align="center" valign="center" rowspan="3"|Substrates | !style="background:silver; color:black" align="center" valign="center" rowspan="3"|Substrates | ||