Specific Process Knowledge/Lithography/Coaters: Difference between revisions
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* PGMEA for edge bead removal | * PGMEA for edge bead removal | ||
* Acetone for chuck cleaning | * Acetone for chuck cleaning | ||
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* AZ MiR 701 (29cps) resist | |||
* AZ nLOF 2020 resist | |||
* PGMEA for backside rinse and edgebead removal | |||
* PGMEA for spinner bowl cleaning and vapor tip bath | |||
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|style="background:LightGrey; color:black"|Manual dispense option | |style="background:LightGrey; color:black"|Manual dispense option | ||
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* yes | * yes | ||
* pneumatic dispense for SU8 resist | * pneumatic dispense for SU8 resist | ||
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* no | |||
|- | |- | ||
!style="background:silver; color:black" align="center" valign="center" rowspan="2"|Process parameter range | !style="background:silver; color:black" align="center" valign="center" rowspan="2"|Process parameter range | ||