Specific Process Knowledge/Lithography/Coaters: Difference between revisions
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===Process information=== | ===Process information=== | ||
'''HMDS priming only:''' | |||
*T1 T2 Standard | *T1 T2 Standard | ||
AZ MiR 701 (29cps) coating: | '''AZ MiR 701 (29cps) coating:''' | ||
*T1 MiR 701 1,5um no HMDS | *T1 MiR 701 1,5um no HMDS | ||
*T1 MiR 701 1,5um with HMDS | *T1 MiR 701 1,5um with HMDS | ||
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*T1 MiR 701 2um no HMDS | *T1 MiR 701 2um no HMDS | ||
*T1 MiR 701 2um with HMDS | *T1 MiR 701 2um with HMDS | ||
'''AZ nLOF 2020 coating:''' | |||
*T2 nLOF 2020 2um no HMDS | |||
*T2 nLOF 2020 2um with HMDS | |||
*T2 nLOF 2020 3um no HMDS | |||
*T2 nLOF 2020 3um with HMDS | |||
*T2 nLOF 2020 4um no HMDS | |||
*T2 nLOF 2020 4um with HMDS | |||
*T2 nLOF 2020 5um no HMDS | |||
*T2 nLOF 2020 5um with HMDS | |||
'''Post-exposure baking:''' | |||
*T2 5214E image reversal bake | |||
*T2 MiR 701 PEB | |||
*T2 nLOF 2020 PEB | |||
Link to process pages - e.g. one page for each material | Link to process pages - e.g. one page for each material | ||