Specific Process Knowledge/Lithography/Coaters: Difference between revisions
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| style="background:LightGrey; color:black"|Allowed materials | | style="background:LightGrey; color:black"|Allowed materials | ||
|style="background:WhiteSmoke; color:black" align="center" colspan="2"| | |style="background:WhiteSmoke; color:black" align="center" colspan="2"| | ||
Silicon | Silicon (with oxide, nitride, or metal films or patterning) | ||
Glass | Glass (borosilicate and quartz) | ||
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|style="background:LightGrey; color:black"|Batch | |style="background:LightGrey; color:black"|Batch | ||